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Application
- spectroscopy
- production of diffraction structures in optical fibers
- materials Processing
- spraying
- micro-marking
Technical characteristics
- compact excimer laser
- stabilization of the average power
- increased the lifetime of the gas mixture
- computer control
- single module
- balloon with a gas mixture
Additionally System installation is equipped with three-coordinate positioner NewPort M-ILS200PP (positioning accuracy - 500 nm).
Specification
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ArF |
KrF |
XeCl |
| Wavelength* |
193 nm |
248 nm |
308 nm |
| Construction |
cermet |
| Preionization |
spark |
| Nominal pulse energy |
250 mJ |
400 mJ |
300 mJ |
| Average power |
20 W |
35 W |
25 W |
Max. frequency
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100 Hz |
| Pulse duration1 |
17 nsec |
20 nsec |
20 nsec |
| Pulse energy stability |
average square deviation < 2% |
| The size of the beam1 |
6 x 20 mm |
6 x 21 mm |
7 x 22 mm |
| Beam divergence1 |
1.5 x 4.5 mrad (stable resonator) |
| Synchronization |
< 2 nsec |
| Service interval2 |
50 mil. |
100 mil. |
200 mil. |
| Dimensions, (w) |
1350 x 375 x 710 mm (170 kg) |
| Cooling |
Water <3 l / min |
| Power supply (three phase) |
380/220V, 50Hz, 10À; 3500 VA or less
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| Gas |
1 balloon with a gas mixture |
| Control |
RS 232, DOS/Windows |
| * - able to operate at a wavelength of 157 nm |
| 1 - FW HM |
| 2 -laser provides a nominal energy |
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